Correlation between thickness and optical properties of thin diamond-like carbon films deposited with RF PACVD method

被引：10
作者：
Smietana, M. [1 ]
Korwin-Pawlowski, M. L. [3 ]
Grabarczyk, J. [2 ]
Szmidt, J. [1 ]
机构：
[1] Warsaw Univ Technol, Inst Microelect & Optoelect, PL-00662 Warsaw, Poland
[2] Tech Univ Lodz, Inst Mat Sci & Engn, PL-90924 Lodz, Poland
[3] Univ Quebec Outaouais, Dept Informat & Ingn, Gatineau, PQ J8X 3X7, Canada
来源：
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS | 2009年 / 165卷 / 1-2期
基金：
加拿大自然科学与工程研究理事会; 加拿大创新基金会;
关键词：
Chemical vapour deposition; Thin film deposition; Diamond-like carbon; Optical properties; Plasma processing; Thin films; SUBPLANTATION MODEL; AMORPHOUS-CARBON; SOLAR-CELL; GRATINGS; SENSOR; LAYERS; PECVD;
D O I：
10.1016/j.mseb.2008.12.037
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The paper discusses optical properties and thickness of the diamond-like carbon (DLC) films deposited with Radio Frequency Plasma Assisted Chemical Vapour Deposition (RF PACVD) method onto < 1 1 1 > oriented silicon substrates. Measurements performed with spectroscopic ellipsometer indicated a significant influence of both self-bias voltage and deposition time on thickness and refractive index of the DLC films. It was also found that optical properties are strongly deposition time dependent. Determination of DLC film thickness with constant optical properties cannot be realized just by adjusting deposition time. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：132 / 134
页数：3
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