ZnO and Aluminium Doped ZnO Thin Films Synthesis by Ultrasonic Spray Pyrolysis Technique

被引：0

作者：

Fedoseev, Alexander G. ^{[1
]}

Lashkova, Natalia A. ^{[1
]}

Matyushkin, Lev B. ^{[1
]}

机构：

[1] St Petersburg Electrotech Univ LETI, Dept Micro & Nanoelect, St Petersburg, Russia

来源：

PROCEEDINGS OF THE 2017 IEEE RUSSIA SECTION YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING CONFERENCE (2017 ELCONRUS) | 2017年

关键词：

thin films; zinc oxide; aluminum doped zinc oxide; styling; ultrasonic spray pyrolysis;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Zinc oxide films and aluminum doped zinc oxide films were prepared by specially designed apparatus for ultrasonic spray pyrolysis. Atomization of precursor solution was produced using an ultrasonic transducer at resonant frequency 1.7 +/- 0.085 MHz. The resulting films thickness is less than 400 nm, average roughness is about 40 nm, and transmittance is more than 85 % in the visible range. Undoped zinc oxide films also showed piezoelectric properties, which proved with piezoresponse force microscopy. The average sheet resistance of aluminum doped zinc oxide films is 200 kOhm. The surface of thin films is smooth, zinc oxide grains have a small size dispersion.

引用

页码：1391 / 1393

页数：3

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