Effects of Additives on Cu-MWCNT Composite Plating Films

被引:24
作者
Arai, Susumu [1 ]
Saito, Takashi [1 ]
Endo, Morinobu [2 ]
机构
[1] Shinshu Univ, Fac Engn, Dept Chem & Mat Engn, Nagano 3808553, Japan
[2] Shinshu Univ, Fac Engn, Dept Elect & Elect Engn, Nagano 3808553, Japan
关键词
additives; carbon nanotubes; copper; current density; electrical resistivity; electrodeposits; electrolytes; field emission; metallic thin films; nanocomposites; surface morphology; CARBON NANOTUBES; COPPER ELECTRODEPOSITION; BEHAVIOR; ADSORPTION; MECHANISM; EMISSION; GROWTH; PEG; SPS; CL;
D O I
10.1149/1.3274202
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The effects of plating bath additives on copper-multiwalled carbon nanotube (MWCNT) composite platings were studied. An acidified cupric sulfate electrolyte containing MWCNTs and polyacrylic acid as a dispersing agent was used as the base plating bath. Chloride ions (Cl-), poly(ethylene glycol), bis(3-sulfopropyl)disulfide (SPS), and Janus green B (JGB) were examined as additives. The surface morphologies and cross-sectional microstructures of the electrodeposited films were investigated, and the MWCNT content of the films was determined. Furthermore, the electrical resistivity and field emission properties of the films were evaluated. The simultaneous addition of Cl-, SPS, and JGB to the base plating bath was effective for forming smooth Cu-MWCNT composite films with a high MWCNT content over a wider range of current densities. The optimal bath composition was 0.85 mol dm(-3) CuSO4 center dot 5H(2)O+0.55 mol dm(-3) H2SO4+100 ppm PA5000+2 g dm(-3) MWCNTs+2 ppm SPS + 2 ppm JGB +50 ppm Cl-. Cu-MWCNT composite films containing 0.15-0.33 mass % MWCNTs with smooth surface morphologies were formed in the current density range of 0.5-5 A dm(-2). The electrical resistivity of the films was around 2 mu cm, and they showed obvious field emission properties.
引用
收藏
页码:D127 / D134
页数:8
相关论文
共 38 条
[1]   Damascene copper electroplating for chip interconnections [J].
Andricacos, PC ;
Uzoh, C ;
Dukovic, JO ;
Horkans, J ;
Deligianni, H .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1998, 42 (05) :567-574
[2]   Various carbon nanofiber-copper composite films prepared by electrodeposition [J].
Arai, S ;
Endo, M .
ELECTROCHEMISTRY COMMUNICATIONS, 2005, 7 (01) :19-22
[3]   Nickel-coated carbon nanofibers prepared by electroless deposition [J].
Arai, S ;
Endo, M ;
Hashizume, S ;
Shimojima, Y .
ELECTROCHEMISTRY COMMUNICATIONS, 2004, 6 (10) :1029-1031
[4]   Ni-deposited multi-walled carbon nanotubes by electrodeposition [J].
Arai, S ;
Endo, M ;
Kaneko, N .
CARBON, 2004, 42 (03) :641-644
[5]   Carbon nanofiber-copper composites fabricated by electroplating [J].
Arai, S ;
Endo, M .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2004, 7 (03) :C25-C26
[6]   Carbon nanofiber-copper composite powder prepared by electrodeposition [J].
Arai, S ;
Endo, M .
ELECTROCHEMISTRY COMMUNICATIONS, 2003, 5 (09) :797-799
[7]  
ARAI S, J ELECTROCH IN PRESS
[8]   Metal-fixed multiwalled carbon nanotube patterned emitters using photolithography and electrodeposition technique [J].
Arai, Susumu ;
Saito, Takashi ;
Endo, Morinobu .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2008, 11 (09) :D72-D74
[9]   Low-internal-stress nickel multiwalled carbon nanotube composite electrodeposited from a sulfamate bath [J].
Arai, Susumu ;
Saito, Takashi ;
Endo, Morinobu .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (10) :D530-D533
[10]   Fabrication of nickel-multiwalled carbon nanotube composite films with excellent thermal conductivity by an electrodeposition technique [J].
Arai, Susumu ;
Endo, Morinobu ;
Sato, Tomoyuki ;
Koide, Atsushi .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2006, 9 (08) :C131-C133