Chromatic line confocal technology in high-speed 3D surface-imaging applications

被引：6

作者：

Niemela, Karri ^{[1
]}

机构：

[1] FocalSpec Ltd, Elekt Katie 13, FI-90590 Oulu, Finland

来源：

PHOTONIC INSTRUMENTATION ENGINEERING VI | 2019年 / 10925卷

关键词：

optical 3D sensors; surface metrology; high-speed in-line inspection; submicron;

D O I：

10.1117/12.2507962

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

FocalSpec chromatic line confocal sensor technology is presented. Performance of the technology is described in terms of z-precision and accuracy. We report on the latest technical developments that improve the measuring speed by 6x. With these developments we are able to deliver sub-micron precise 3D point clouds with speeds up to 24 Million points per second. Potential applications are discussed.

引用

页数：8