A Differential Burn-in Policy Considering Nonhomogeneous Distribution of Spatial Defects in Semiconductor Manufacturing

被引：0

作者：

Yuan, Tao ^{[1
]}

Chen, Yuan ^{[1
]}

Kuo, Yue ^{[2
]}

机构：

[1] Ohio Univ, Dept Ind & Syst Engn, Athens, OH 45701 USA

[2] Texas A&M Univ, Dept Chem Engn, College Stn, TX 77843 USA

来源：

2020 ASIA-PACIFIC INTERNATIONAL SYMPOSIUM ON ADVANCED RELIABILITY AND MAINTENANCE MODELING (APARM) | 2020年

基金：

美国国家科学基金会;

关键词：

burn-in; defects; integrated circuits; optimization; semiconductor manufacturing; mixture distribution; OF-THE-ART;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

This paper proposes a differential burn-in policy that considers the spatial nonhomogeneous distribution of defects in semiconductor manufacturing. Due to the nonhomogeneous distribution of spatial defects, devices at different locations on a semiconductor wafer may exhibit different probabilities of being defective. Unlike conventional burn-in policies, which subject all devices to the same burn-in test, the differential burn-in policy can take different actions for different devices, i.e., acceptance without burn-in, rejection without burn-in, or burn-in with a certain duration. A mixed integer nonlinear programming model is developed to find the cost-optimal decisions. A numerical example is used to demonstrate the potential application of the proposed burn-in policy.

引用

页数：4

共 7 条

[1] A new analytic model for the description of the intrinsic oxide breakdown statistics of ultra-thin oxides
Degraeve, R
Roussel, PH
Groeseneken, G
Maes, HE
[J]. MICROELECTRONICS AND RELIABILITY, 1996, 36 (11-12): : 1639 - 1642
[2] Hwang J. Y., 2004, SPATIAL STOCHASTIC P
[3] Hwang J. Y., DIFFERENTIAL B UNPUB
[4] A critical look at the bathtub curve
Klutke, GA
Kiessler, PC
Wortman, MA
[J]. IEEE TRANSACTIONS ON RELIABILITY, 2003, 52 (01) : 125 - 129
[5] KUO W, 1983, P IEEE, V71, P1257, DOI 10.1109/PROC.1983.12763
[6] Kuo W., 1998, Reliability, Yield, and Stress Burn-in
[7] The Optimal Burn-in: State of the Art and New Advances for Cost Function Formulation
Liu, Xin
Mazzuchi, Thomas A.
[J]. RECENT ADVANCES IN RELIABILITY AND QUALITY IN DESIGN, 2008, : 137 - +

← 1 →