Synchrotron white beam topography characterization of physical vapor transport grown AlN and ammonothermal GaN

被引:18
作者
Raghothamachar, B [1 ]
Vetter, WM
Dudley, M
Dalmau, R
Schlesser, R
Sitar, Z
Michaels, E
Kolis, JW
机构
[1] SUNY Stony Brook, Dept Mat Sci & Engn, Stony Brook, NY 11794 USA
[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[3] Clemson Univ, Dept Chem, Clemson, SC 29634 USA
关键词
defects; X-ray topography; growth from vapor; single crystal growth; aluminum nitride; gallium nitride;
D O I
10.1016/S0022-0248(02)01751-7
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Structural defects in AlN single crystals grown by the sublimation method and GaN single crystals grown by the ammonothermal method are characterized by synchrotron white-beam X-ray topography in conjunction with optical microscopy. AlN platelets are either of (1 1 (2) over bar 0) or (0 0 0 1) type depending on the growth conditions. Dislocation densities of the order of 10(3) cm(-2) or lower are observed in some crystals. X-ray topographs reveal the presence of growth sector boundaries, inclusions, and growth dislocations that indicate slight impurity contamination. The 2H crystal structure of GaN single crystals obtained by the ammonothermal method was verified by Lane X-ray pattern analysis. GaN crystals grown are of the order of I mm in size and are either (0 0 0 1) platelets or [0 0 0 1] prismatic needles. Generally, prismatic needles are characterized by lower degree of mosaicity than (0 0 0 1) platelets. (C) 2002 Published by Elsevier Science B.V.
引用
收藏
页码:271 / 280
页数:10
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