Exploring microdischarges for portable sensing applications

被引：42

作者：

Gianchandani, Y. B. ^{[1
]}

Wright, S. A. ^{[1
]}

Eun, C. K. ^{[1
]}

Wilson, C. G. ^{[2
]}

Mitra, B. ^{[3
]}

机构：

[1] Univ Michigan, Ctr Wireless Integrated Microsyst, Ann Arbor, MI 48109 USA

[2] Louisiana Tech Univ, Inst Micromfg, Ruston, LA 71272 USA

[3] Rutgers State Univ, Dept Elect Engn & Comp Engn, Piscataway, NJ 08854 USA

来源：

ANALYTICAL AND BIOANALYTICAL CHEMISTRY | 2009年 / 395卷 / 03期

基金：

美国国家科学基金会;

关键词：

Plasma; Discharge; Chemical; Radiation; Pressure; DIELECTRIC BARRIER DISCHARGE; CAPACITIVELY COUPLED MICROPLASMA; MICROHOLLOW CATHODE-DISCHARGE; OPTICAL-EMISSION SOURCE; ON-A-CHIP; ATMOSPHERIC-PRESSURE; GLOW-DISCHARGE; GAS-CHROMATOGRAPHY; ORGANIC-COMPOUNDS; LOW-TEMPERATURE;

D O I：

10.1007/s00216-009-3011-6

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

This paper describes the use of microdischarges as transducing elements in sensors and detectors. Chemical and physical sensing of gases, chemical sensing of liquids, and radiation detection are described. These applications are explored from the perspective of their use in portable microsystems, with emphasis on compactness, power consumption, the ability to operate at or near atmospheric pressure (to reduce pumping challenges), and the ability to operate in an air ambient (to reduce the need for reservoirs of carrier gases). Manufacturing methods and performance results are described for selected examples.

引用

页码：559 / 575

页数：17

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