Few-layer HfS2 transistors

被引:140
作者
Kanazawa, Toru [1 ]
Amemiya, Tomohiro [2 ,3 ]
Ishikawa, Atsushi [3 ,4 ,5 ]
Upadhyaya, Vikrant [1 ]
Tsuruta, Kenji [4 ]
Tanaka, Takuo [3 ,5 ,6 ]
Miyamoto, Yasuyuki [1 ]
机构
[1] Tokyo Inst Technol, Dept Phys Elect, Tokyo 1528552, Japan
[2] Tokyo Inst Technol, Quantum Nano Elect Res Ctr, Tokyo 1528552, Japan
[3] RIKEN, Metamat Lab, 2-1 Hirosawa, Wako, Saitama 3510198, Japan
[4] Okayama Univ, Dept Elect & Elect Engn, Okayama 7008530, Japan
[5] RIKEN, Innovat Photon Manipulat Res Team, 2-1 Hirosawa, Wako, Saitama 3510198, Japan
[6] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Tokyo 2268502, Japan
关键词
FIELD-EFFECT TRANSISTORS; SEMICONDUCTOR; SCATTERING; TRANSPORT; MOBILITY; FILM;
D O I
10.1038/srep22277
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
HfS2 is the novel transition metal dichalcogenide, which has not been experimentally investigated as the material for electron devices. As per the theoretical calculations, HfS2 has the potential for well-balanced mobility (1,800 cm(2)/V.s) and bandgap (1.2 eV) and hence it can be a good candidate for realizing low-power devices. In this paper, the fundamental properties of few-layer HfS2 flakes were experimentally evaluated. Micromechanical exfoliation using scotch tape extracted atomically thin HfS2 flakes with varying colour contrasts associated with the number of layers and resonant Raman peaks. We demonstrated the I-V characteristics of the back-gated few-layer (3.8 nm) HfS2 transistor with the robust current saturation. The on/off ratio was more than 10(4) and the maximum drain current of 0.2 mu A/mu m was observed. Moreover, using the electric double-layer gate structure with LiClO4: PEO electrolyte, the drain current of the HfS2 transistor significantly increased to 0.75 mA/mu m and the mobility was estimated to be 45 cm(2)/V.s at least. This improved current seemed to indicate superior intrinsic properties of HfS2. These results provides the basic information for the experimental researches of electron devices based on HfS2.
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页数:9
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