Localized Attachment of Carbon Nanotubes in Microelectronic Structures

被引:13
作者
Joyeux, Xavier [1 ]
Mangiagalli, Paolo [1 ]
Pinson, Jean [1 ]
机构
[1] Alchimer, F-91300 Massy, France
关键词
ELECTROCHEMICAL REDUCTION; DIAZONIUM SALTS; COVALENT MODIFICATION; SILICON SURFACES; FUNCTIONALIZATION; ELECTRODE; LAYERS; SPECTROSCOPY; ARRAYS;
D O I
10.1002/adma.200900121
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Carbon Nanotubes (CNTs) are covalently modified by the monodiadozium salt of ethylene dianiline; further diazotation of the free amino group permits the selective attachment of these CNTs to the Si or Ti bottom of SiO2 trenches. The symmetrical electrografting of the bottom of the trenches, followed by the attachment of pristine CNTs, is also described.
引用
收藏
页码:4404 / +
页数:6
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