A near-infrared digital camera in polycrystalline germanium integrated on silicon

被引:28
作者
Colace, Lorenzo [1 ]
Masini, Gianlorenzo
Cencelli, Valentino
DeNotaristefani, Francesco
Assanto, Gaetano
机构
[1] Univ Roma Tre, Dept Elect Engn, Nonlinear Opt & OptoElect Lab, I-00146 Rome, Italy
[2] Univ Roma Tre, CNISM, I-00146 Rome, Italy
[3] Univ Roma Tre, Ist Nazl Fis Nucl, Natl Inst Nucl Phys, I-00146 Rome, Italy
[4] Univ Roma Tre, Dept Elect Engn, Microelect Lab, I-00146 Rome, Italy
关键词
CMOS integrated circuits; germanium radiation detectors; imaging; near infrared; optoelectronic devices; photodiodes; silicon optoelectronics;
D O I
10.1109/JQE.2007.893001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the first silicon-integrated 2-D light-sensitive array equipped with complementary-metal-oxide-semiconductor addressing and readout electronics and operating in the near infrared. The chip includes 64 x 8 pixels, 64 analog-to-digital converters, cancellation circuitry for dark current, and facilities for test/calibration. We describe its architecture and fabrication, its electronic and optoelectronic characterization, as well as its operation as a near-infrared camera.
引用
收藏
页码:311 / 315
页数:5
相关论文
共 15 条
[1]  
COLACE L, 2006, SILICON HETEROSTRUCT, P731
[2]  
COLACE L, 1998, MICROCRYST NANOCRYST, V536, P469
[3]   Investigation of near-infrared autofluorescence imaging for the detection of breast cancer [J].
Demos, SG ;
Bold, R ;
White, RD ;
Ramsamooj, R .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2005, 11 (04) :791-798
[4]   A room temperature 640x512 pixel near-infrared InGaAs focal plane array [J].
Ettenberg, MH ;
Lange, MJ ;
O'Grady, MT ;
Vermaak, JS ;
Cohen, MJ ;
Olsen, GH .
INFRARED DETECTORS AND FOCAL PLANE ARRAYS VI, 2000, 4028 :201-207
[5]  
JIANG H, 2005, P SOC PHOTO-OPT INS, V5996, P17
[6]  
KIM W, 2002, P SOC PHOTO-OPT INS, V4850, P202
[7]   Noninvasive blood glucose assay using a newly developed near-infrared system [J].
Maruo, K ;
Tsurugi, M ;
Chin, J ;
Ota, T ;
Arimoto, H ;
Yamada, Y ;
Tamura, M ;
Ishii, M ;
Ozaki, Y .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2003, 9 (02) :322-330
[8]   Linear array of Si-Ge heterojunction photodetectors monolithically integrated with silicon CMOS readout electronics [J].
Masini, G ;
Cencelli, V ;
Colace, L ;
de Notaristefani, F ;
Assanto, G .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2004, 10 (04) :811-815
[9]   2.5 Gbit/s polycrystalline germanium-on-silicon photodetector operating from 1.3 to 1.55 μm [J].
Masini, G ;
Colace, L ;
Assanto, G .
APPLIED PHYSICS LETTERS, 2003, 82 (15) :2524-2526
[10]   Monolithic integration of near-infrared Ge photodetectors with Si complementary metal-oxide-semiconductor readout electronics [J].
Masini, G ;
Cencelli, V ;
Colace, L ;
De Notaristefani, F ;
Assanto, G .
APPLIED PHYSICS LETTERS, 2002, 80 (18) :3268-3270