The development of micro-gyroscope technology

被引：198

作者：

Liu, Kai ^{[1
]}

Zhang, Weiping ^{[1
]}

Chen, Wenyuan ^{[1
]}

Li, Kai ^{[1
]}

Dai, Fuyan ^{[1
]}

Cui, Feng ^{[1
]}

Wu, Xiaosheng ^{[1
]}

Ma, Gaoyin ^{[1
]}

Xiao, Qijun ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Key Lab Thin Film & Microfabricat, Natl Key Lab Micro Nano Fabricat Technol, Res Inst Micro Nano Technol,Minist Educ, Shanghai 200030, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 11期

基金：

美国国家科学基金会;

关键词：

DESIGN; SENSOR; DRIVE;

D O I：

10.1088/0960-1317/19/11/113001

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This review reports an overview and development of micro-gyroscope. The review first presents different types of micro-gyroscopes. Micro-gyroscopes in this review are categorized into Coriolis gyroscope, levitated rotor gyroscope, Sagnac gyroscope, nuclear magnetic resonance (NMR) gyroscope according to the working principle. Different principles, structures, materials, fabrications and control technologies of micro-gyroscopes are analyzed. This review compares different classes of gyroscopes in the aspects such as fabrication method, detection axis, materials, size and so on. Finally, the review evaluates the key technologies on how to improve the precision and anti-jamming ability and to extend the available applications of the gyroscopes in the market and patents as well.

引用

页数：29

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