Kinetic modeling of the NF3 decomposition via dielectric barrier discharges in N2/NF3 mixtures

Emission of PFCs (perfluorocompound) has attracted much attention in recent years due to its relatively high contribution to the global warming. Non-thermal plasma is one of the most promising technologies to effectively control the PFC emissions. In this study, a cylindrical DBD (dielectric barrier discharge) reactor is adopted for the treatment of NF3-containing streams. Besides the experimental work, a numerical model is also developed for better understanding of the reaction mechanism of NF3 abatement in N-2/NF3 mixtures. Good agreement is observed between the experimental data and the simulation results. Simulation results indicate that the electrons and the N atoms are the major active species responsible for the NF3 decomposition. In addition, N-2(A (3)Sigma(+)(u)) metastables plays a significant role in the NF3 abatement. A simplified mechanism for the NF3 decomposition in the N-2 - NF3 plasmas is proposed as well.