Monolithic Three Dimensional Dielectrophoretic Actuator for Positioning Optics Fabricated by Femtosecond Laser

被引：0
|
作者：
Yang, Tao [1 ]
Bellouard, Yves [1 ]
机构：
[1] Eindhoven Univ Technol, Dept Mech Engn, Dolech 2, NL-5612 AZ Eindhoven, Netherlands
来源：
2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2014年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report a monolithic three dimensional dielectrophoretic micro-actuator fabricated by femtosecond laser in fused silica. Such actuators are useful for fine positioning of optical fibers and for introducing optomechanical coupling in waveguides.
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