Power spectral density(PSD) in stitching interferometer

被引：0

作者：

Yu, YJ ^{[1
]}

Li, GP ^{[1
]}

机构：

[1] Shanghai Univ, Dept Precis Mech Engn, Shanghai 200072, Peoples R China

来源：

SURFACE SCATTERING AND DIFFRACTION FOR ADVANCED METROLOGY II | 2002年 / 4780卷

关键词：

stitching interferometer; power spectral density; frequency distortion;

D O I：

10.1117/12.451843

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

For the optical components in high power laser system, there are some special demands, therefore, there are some peculiar needs in evaluating, for example the testing in middle frequency segment is emphasized. Considering these special demands, power spectral density(PSD) is used as one of the important evaluating parameters. The paper summarizes the meaning of utilizing PSD, its calculation and demarcation methods. For measurement instrument, the paper chooses stitching interferometer to realize the testing of the optics of large scale. In order to test the frequency distortion in stitching, the paper applies PSD as the compared parameter. The results testifies that stitching can not introduce additional frequency distortion.

引用

页码：126 / 137

页数：12

共 12 条

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