Large-Area, Low-Cost Infrared Metamaterial Fabrication Via Pulsed Laser Deposition with Metallic Mesh as a Shadow Mask

Metamaterials are artificial periodic structures with negative permittivity and permeability. Several interesting properties can be obtained in metamaterials, such as negative index behavior, which can be used for building perfect lenses, cloaking, antennas, etc. As the metamaterial's properties are determined by its structure, the key challenge is to reduce the fabrication cost of the periodic structure on the micrometer or nanometer scale for realistic applications. In this paper, we experimentally demonstrate a new one-step method for the fabrication of a large-area infrared metamaterial at extremely low cost. A metallic mesh is used as a shadow mask during the pulsed laser deposition (PLD) process to fabricate a FeNi/SiC/FeNi multilayer sandwich structure on Si substrate (cm(2) level). The sample shows a strong absorption peak in the infrared frequency range, and the absorption intensity changes with the sample's geometry.