Thermally driven micro-electrostatic fieldmeter

被引：51

作者：

Chen, Xianxiang

Peng, Chunrong

Tao, Hu

Ye, Chao

Bai, Qiang

Chen, Shaofeng

Xia, Shanhong ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 132卷 / 02期

基金：

中国国家自然科学基金;

关键词：

MEMS; micro-electrostatic fieldmeter; thermal actuator; correlation detection;

D O I：

10.1016/j.sna.2006.02.044

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A thermally driven micro-electrostatic fieldmeter is reported, which mainly consists of sense electrodes, grounded shuttle electrodes, bent beam thermal driver, etc. The bent beam thermal driver is driven with a square wave of amplitude as low as 2 V amplitude and of frequency as high as 20 kHz. The electric field intensity resolution of the electrostatic fieldmeter can reach 240.8 V/m. (c) 2006 Elsevier B.V. All rights reserved.

引用

收藏

页码：677 / 682

页数：6

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