Zn+ Implanted Silicon Waveguide Photodiodes for On-Chip Mid-Infrared Detection

被引：0

作者：

Grote, Richard R. ^{[1
]}

Souhan, Brian ^{[1
]}

Ophir, Noam ^{[2
]}

Driscoll, Jeffrey B. ^{[1
]}

Bergman, Keren ^{[2
]}

Bakhru, Hassaram ^{[3
]}

Green, William M. J. ^{[4
]}

Osgood, Richard M., Jr. ^{[1
]}

机构：

[1] Columbia Univ, Microelect Sci Labs, New York, NY 10027 USA

[2] Columbia Univ, Dept Elect Engn, New York, NY 10027 USA

[3] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA

[4] IBM TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA

来源：

2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2014年

关键词：

ERROR-FREE OPERATION; MU-M;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the first experimental demonstration of Zn+ implanted Si waveguide photodiodes for 2.2-2.4 mu m operation. Preliminary responsivities >65 mA/W are measured, suggesting suitability for on-chip sensing and communications applications in the mid-infrared.

引用

页数：2

共 9 条

[1] 10 Gbps silicon waveguide-integrated infrared avalanche photodiode [J].

Ackert, Jason J. ;

Karar, Abdullah S. ;

Paez, Dixon J. ;

Jessop, Paul E. ;

Cartledge, John C. ;

Knights, Andrew P. .

OPTICS EXPRESS, 2013, 21 (17) :19530-19537

[2] All silicon infrared photodiodes: photo response and effects of processing temperature [J].

Geis, M. W. ;

Spector, S. J. ;

Grein, M. E. ;

Schulein, R. T. ;

Yoon, J. U. ;

Lennon, D. M. ;

Wynn, C. M. ;

Palmacci, S. T. ;

Gan, F. ;

Kaertner, F. X. ;

Lyszczarz, T. M. .

OPTICS EXPRESS, 2007, 15 (25) :16886-16895

[3] 10 Gb/s Error-Free Operation of All-Silicon Ion-Implanted-Waveguide Photodiodes at 1.55 μm [J].

Grote, Richard R. ;

Padmaraju, Kishore ;

Souhan, Brian ;

Driscoll, Jeffrey B. ;

Bergman, Keren ;

Osgood, Richard M., Jr. .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (01) :67-70

[4] Si-CMOS compatible materials and devices for mid-IR microphotonics [J].

Lin, Pao Tai ;

Singh, Vivek ;

Wang, Jianfei ;

Lin, Hongtao ;

Hu, Juejun ;

Richardson, Kathleen ;

Musgraves, J. David ;

Luzinov, Igor ;

Hensley, Joel ;

Kimerling, Lionel C. ;

Agarwal, Anu .

OPTICAL MATERIALS EXPRESS, 2013, 3 (09) :1474-1487

[5] Mid-infrared optical parametric amplifier using silicon nanophotonic waveguides [J].

Liu, Xiaoping ;

Osgood, Richard M., Jr. ;

Vlasov, Yurii A. ;

Green, William M. J. .

NATURE PHOTONICS, 2010, 4 (08) :557-560

[6] Silicon-based heterogeneous photonic integrated circuits for the mid-infrared [J].

Roelkens, Gunther ;

Dave, Utsav ;

Gassenq, Alban ;

Hattasan, Nannicha ;

Hu, Chen ;

Kuyken, Bart ;

Leo, Francois ;

Malik, Aditya ;

Muneeb, Muhammad ;

Ryckeboer, Eva ;

Uvin, Sarah ;

Hens, Zeger ;

Baets, Roel ;

Shimura, Yosuke ;

Gencarelli, Federica ;

Vincent, Benjamin ;

Loo, Roger ;

Van Campenhout, Joris ;

Cerutti, Laurent ;

Rodriguez, Jean-Baptiste ;

Tournie, Eric ;

Chen, Xia ;

Nedeljkovic, Milos ;

Mashanovich, Goran ;

Shen, Li ;

Healy, Noel ;

Peacock, Anna C. ;

Liu, Xiaoping ;

Osgood, Richard ;

Green, William .

OPTICAL MATERIALS EXPRESS, 2013, 3 (09) :1523-1536

[7] PROPERTIES OF HIGH-PERFORMANCE BACKGROUND LIMITED P-TYPE SI-ZN PHOTOCONDUCTORS [J].

SCLAR, N .

SOLID-STATE ELECTRONICS, 1981, 24 (03) :203-213

[8] Mid-infrared photonics in silicon and germanium [J].

Soref, Richard .

NATURE PHOTONICS, 2010, 4 (08) :495-497

[9] Error-Free Operation of an All-Silicon Waveguide Photodiode at 1.9 μm [J].

Souhan, Brian ;

Chen, Christine P. ;

Grote, Richard R. ;

Driscoll, Jeffrey B. ;

Ophir, Noam ;

Bergman, Keren ;

Osgood, Richard M., Jr. .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (21) :2031-2034

← 1 →