Lithium Niobate Optomechanical Disk Resonators

被引：1

作者：

Wang, Renyuan ^{[1
]}

Bhave, Sunil A. ^{[2
]}

机构：

[1] BAE Syst, FAST LabsTM, Nashua, NH 03064 USA

[2] Purdue Univ, OxideMEMS Lab, W Lafayette, IN 47907 USA

来源：

2020 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (IFCS-ISAF) | 2020年

基金：

美国国家科学基金会;

关键词：

Micromachining; Lithium Niobate; optomechanics disk resonator; acousto-optic modulator;

D O I：

10.1109/ifcs-isaf41089.2020.9264025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, opto-mechanics and nonlinear optics. This paper presents free-standing thin-film lithium niobate optomechanical resonators on a silicon platform using MEMS fabrication technology. We fabricated a 35 micron radiu niobate disk resonator that exhibits high intrinsic optical quality factor (Q) of 484,000. Exploiting the optomechanical interaction from the released free-standing structure and high optical Q, we were able to demonstrate acousto-optic modulation from these devices by exciting the 56 MHz radial breathing mode (mechanical Q of 2700) and 1.9 GHz mechanical mode using a hovering probe.

引用

页数：4

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