A 300-V LDMOS Analog-Multiplexed Driver for MEMS Devices

被引:29
作者
Dai, Shanshan [1 ,2 ]
Knepper, Ronald W. [1 ]
Horenstein, Mark N. [1 ]
机构
[1] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[2] Brown Univ, Sch Engn, Providence, RI 02912 USA
关键词
Analog switch; class-B amplifier; frequency compensation; high voltage integrated circuits; HV amplifier; LDMOS; level shifter; MEMS; off-isolation; 3-STAGE AMPLIFIER; CAPACITIVE LOAD;
D O I
10.1109/TCSI.2015.2495723
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The paper presents a high-voltage integrated-circuit driver capable of producing analog voltages up to 300 V, using Dalsa's 0.8-mu m HV CMOS/DMOS process, suitable for MEMS and medical systems. The IC driver includes a HV operational amplifier (op-amp) with a class-B output stage, and HV analog switches with improved off-isolation performance. In contrast to previous frequency compensation schemes, where only one dominant pole occurs below the unity-gain bandwidth, the HV op-amp employs a novel frequency compensation topology with three poles and two zeros located within the unity-gain bandwidth, and is capable of driving large capacitive loads from 100 pF to 10 nF. Theoretical analysis of off-isolation of the HV analog switches is also reported and confirms the improvement in off-isolation performance.
引用
收藏
页码:2806 / 2816
页数:11
相关论文
共 21 条
[1]  
Bianchi D., 2012, 2012 IEEE International Solid-State Circuits Conference (ISSCC), P370, DOI 10.1109/ISSCC.2012.6177054
[2]   Microelectromechanical deformable mirrors [J].
Bifano, TG ;
Perreault, J ;
Mali, RK ;
Horenstein, MN .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1999, 5 (01) :83-89
[3]   An Ultrasonic Transducer Interface IC With Integrated Push-Pull 40 Vpp, 400 mA Current Output, 8-bit DAC and Integrated HV Multiplexer [J].
Borg, Johan ;
Johansson, Jonny .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2011, 46 (02) :475-484
[4]   High-voltage DMOS integrated circuits using floating-gate protection technique [J].
Chebli, Robert ;
Sawan, Mohamad ;
El-Sankary, Kamal ;
Savaria, Yvon .
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2010, 62 (02) :223-235
[5]   Cross Feedforward Cascode Compensation for Low-Power Three-Stage Amplifier With Large Capacitive Load [J].
Chong, Sau Siong ;
Chan, Pak Kwong .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2012, 47 (09) :2227-2234
[6]   A versatile micropower high-voltage flat-panel display driver in a 100-V 0.7-μm CMOS intelligent interface technology [J].
Doutreloigne, J ;
De Smet, H ;
Van Calster, A .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2001, 36 (12) :2039-2048
[7]  
Doutreloigne J., 2006, P IEEE INT S VLSI DE, P1
[8]  
Dufort B, 2002, 2002 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, P78, DOI 10.1109/SOI.2002.1044425
[9]   Advances in reversed nested Miller compensation [J].
Grasso, Alfio Dario ;
Palumbo, Gaetano ;
Pennisi, Salvatore .
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS, 2007, 54 (07) :1459-1470
[10]   Dual Active-Capacitive-Feedback Compensation for Low-Power Large-Capacitive-Load Three-Stage Amplifiers [J].
Guo, Song ;
Lee, Hoi .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2011, 46 (02) :452-464