Structured Ti/Hydrocarbon Plasma Polymer Nanocomposites Produced By Magnetron Sputtering with Glancing Angle Deposition

被引：31
作者：
Choukourov, Andrei [1 ]
Solar, Pavel [1 ]
Polonskyi, Oleksandr [1 ]
Hanus, Jan [1 ]
Drabik, Martin [1 ]
Kylian, Ondrej [1 ]
Pavlova, Ewa [2 ]
Slavinska, Danka [1 ]
Biederman, Hynek [1 ]
机构：
[1] Charles Univ Prague, Fac Math & Phys, Dept Macromol Phys, CR-18000 Prague, Czech Republic
[2] Acad Sci Czech Republ, Inst Macromol Chem, Dept Polymer Mat, CR-16206 Prague, Czech Republic
来源：
PLASMA PROCESSES AND POLYMERS | 2010年 / 7卷 / 01期
关键词：
glancing angle deposition; nanocomposites; nanostructures; plasma polymerization; sputtering; THIN-FILMS; MICROSTRUCTURE; GROWTH;
D O I：
10.1002/ppap.200900064
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Structured Ti/hydrocarbon plasma polymer nanocomposite films are deposited at a glancing angle by magnetron sputtering of titanium in an Ar/hexane mixture and by sequential magnetron sputtering of titanium and polypropylene. The surface chemistry of such films is tuned by adjusting the gas mixture composition. The structure of the substrate may convert the morphology of organic films deposited at a glancing angle from continuous to nanostructured thin films.
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页码：25 / 32
页数：8
相关论文
共 25 条
  • [1] [Anonymous], 1978, THIN FILM PROCESSES
  • [2] Biederman H., 1992, PLASMA POLYM PROCESS
  • [3] Composite Ag/C:H films prepared by DC planar magnetron deposition
    Boldyryeva, H
    Hlídek, P
    Biederman, H
    Slavínská, D
    Choukourov, A
    [J]. THIN SOLID FILMS, 2003, 442 (1-2) : 86 - 92
  • [4] Plasma polymer films from sputtered polyimide
    Choukourov, A.
    Hanus, J.
    Kousal, J.
    Grinevich, A.
    Pihosh, Y.
    Slavinska, D.
    Biederman, H.
    [J]. VACUUM, 2006, 81 (04) : 517 - 526
  • [5] Large-area microfabrication of three-dimensional, helical polymer structures
    Elias, AL
    Harris, KD
    Bastiaansen, CWM
    Broer, DJ
    Brett, MJ
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (01) : 49 - 54
  • [6] Growth of epitaxial CrN on MgO(001): Role of deposition angle on surface morphological evolution
    Frederick, JR
    D'Arcy-Gall, J
    Gall, D
    [J]. THIN SOLID FILMS, 2006, 494 (1-2) : 330 - 335
  • [7] A MULTITECHNIQUE STUDY OF THE SPONTANEOUS OXIDATION OF N-HEXANE PLASMA POLYMERS
    GENGENBACH, TR
    VASIC, ZR
    CHATELIER, RC
    GRIESSER, HJ
    [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1994, 32 (08) : 1399 - 1414
  • [8] Nanocomposite Ti/hydrocarbon plasma polymer films from reactive magnetron sputtering as growth support for osteoblast-like and endothelial cells
    Grinevich, Andrey
    Bacakova, Lucie
    Choukourov, Andrei
    Boldyryeva, Hanna
    Pihosh, Yuriy
    Slavinska, Danka
    Noskova, Lenka
    Skuciova, Maria
    Lisa, Vera
    Biedermanl, Hynek
    [J]. JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A, 2009, 88A (04) : 952 - 966
  • [9] Highly ordered organic Alq3 chiral luminescent thin films fabricated by glancing-angle deposition
    Hrudey, PCP
    Westra, KL
    Brett, MJ
    [J]. ADVANCED MATERIALS, 2006, 18 (02) : 224 - +
  • [10] Two-component nanopillar arrays grown by Glancing Angle Deposition
    Kesapragada, SV
    Gall, D
    [J]. THIN SOLID FILMS, 2006, 494 (1-2) : 234 - 239
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