Structured Ti/Hydrocarbon Plasma Polymer Nanocomposites Produced By Magnetron Sputtering with Glancing Angle Deposition

被引：32

作者：

Choukourov, Andrei ^{[1
]}

Solar, Pavel ^{[1
]}

Polonskyi, Oleksandr ^{[1
]}

Hanus, Jan ^{[1
]}

Drabik, Martin ^{[1
]}

Kylian, Ondrej ^{[1
]}

Pavlova, Ewa ^{[2
]}

Slavinska, Danka ^{[1
]}

Biederman, Hynek ^{[1
]}

机构：

[1] Charles Univ Prague, Fac Math & Phys, Dept Macromol Phys, CR-18000 Prague, Czech Republic

[2] Acad Sci Czech Republ, Inst Macromol Chem, Dept Polymer Mat, CR-16206 Prague, Czech Republic

来源：

PLASMA PROCESSES AND POLYMERS | 2010年 / 7卷 / 01期

关键词：

glancing angle deposition; nanocomposites; nanostructures; plasma polymerization; sputtering; THIN-FILMS; MICROSTRUCTURE; GROWTH;

D O I：

10.1002/ppap.200900064

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Structured Ti/hydrocarbon plasma polymer nanocomposite films are deposited at a glancing angle by magnetron sputtering of titanium in an Ar/hexane mixture and by sequential magnetron sputtering of titanium and polypropylene. The surface chemistry of such films is tuned by adjusting the gas mixture composition. The structure of the substrate may convert the morphology of organic films deposited at a glancing angle from continuous to nanostructured thin films.

引用

页码：25 / 32

页数：8

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