Low-Pressure Helicon-Plasma Discharge Initiation via Magnetic Field Ramping

被引:4
|
作者
Wiebold, Matt [1 ]
Ren, He [1 ]
Denning, C. Mark [2 ]
Scharer, John E. [1 ,3 ]
机构
[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA
[2] Lenterra Inc, Newark, NJ 07103 USA
[3] Univ Wisconsin, Ctr Plasma Theory & Computat, Madison, WI 53706 USA
关键词
Breakdown; helicon; multipactor; MULTIPACTOR DISCHARGE; BREAKDOWN;
D O I
10.1109/TPS.2009.2031645
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Discharge initiation at low pressures and flow rates is investigated in the Madison Helicon Experiment flowing helicon source. At low pressures (below 14-sccm flow rate), a threshold magnetic field exists for discharge initiation which depends on RF power and gas flow rate. Above the threshold magnetic field, RF discharges start only after a significant delay (approximately seconds) and sometimes will not start at all. This threshold magnetic field is interpreted using electron multipactor arguments. A technique is described for initiating discharges at low flow rates and pressures (lambda(en, iz) > L-system) and high magnetic fields (above the threshold value). Without a static magnetic field present, the RF power is turned on, and a lower density (< 10(11) cm(-3)) unmagnetized discharge occurs. The magnetic field is then applied, and the discharge transitions to the higher density (up to 10(13) cm(-3)) regime. Using this method, magnetized discharges can be started at flow rates as low as 1 sccm (1.8 x 10(-4) torr at z = -91 cm, 1.7 x 10(-5) torr at z = 105 cm) at 500 W in a 1.04-kG magnetic field. This technique can be used to initiate low-pressure helicon discharges for basic plasma science experiments and other applications.
引用
收藏
页码:2110 / 2115
页数:6
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