The magnetic field application for the gas discharge plasma control in processes of surface coating and modification

被引:3
作者
Asadullin, T. Ya [1 ]
Galeev, I. G. [1 ]
机构
[1] Kazan Natl Res Tech Univ KAI, Gen Phys Dept, K Marx St 10, Kazan 420111, Russia
来源
VIII ALL-RUSSIAN (WITH INTERNATIONAL PARTICIPATION) CONFERENCE ON LOW TEMPERATURE PLASMA IN THE PROCESSES OF FUNCTIONAL COATING PREPARATION | 2017年 / 789卷
关键词
D O I
10.1088/1742-6596/789/1/012003
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper the method of magnetic field application to control the gas discharge plasma effect on the various surfaces in processes of surface coating and modification is considered. The magnetic field directed perpendicular to the direction of electric current in the gas discharge plasma channel is capable to reject this plasma channel due to action of Lorentz force on the moving electrically charged particles [1,2]. The three-dimensional spatial structure of magnetic field is created by system of necessary quantity of the magnets located perpendicular to the direction of course of electric current in the gas-discharge plasma channel. The formation of necessary spatial distribution of magnetic field makes possible to obtain a required distribution of plasma parameters near the processed surfaces. This way of the plasma channel parameters spatial distribution management is the most suitable for application in processes of plasma impact on a surface of irregular shape and in cases when the selective impact of plasma on a part of a surface of a product is required. It is necessary to apply automated computer management of the process parameters [3] to the most effective plasma impact.
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页数:3
相关论文
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