Ion-cut lithium niobate on insulator technology: Recent advances and perspectives

被引:193
作者
Jia, Yuechen [1 ]
Wang, Lei [1 ]
Chen, Feng [1 ]
机构
[1] Shandong Univ, Sch Phys, State Key Lab Crystal Mat, Jinan 250100, Peoples R China
关键词
SUM-FREQUENCY GENERATION; WHISPERING-GALLERY MODES; MACH-ZEHNDER MODULATORS; PHOTONIC BOUND-STATES; HIGH-QUALITY FACTOR; RIDGE WAVE-GUIDES; THIN-FILM; 2ND-HARMONIC GENERATION; MICRORING RESONATORS; HIGH-PERFORMANCE;
D O I
10.1063/5.0037771
中图分类号
O59 [应用物理学];
学科分类号
摘要
Lithium niobate (LiNbO3 or LN) is a well-known multifunctional crystal that has been widely applied in various areas of photonics, electronics, and optoelectronics. In the past decade, "ion-cut" has become the key technique to produce wafer-size, high-quality, sub micrometer-thickness crystalline LiNbO3 thin films, i.e., lithium-niobate-on-insulator (LNOI). With the rapid development of LNOI technology and the tremendous progress of associated surface structuring and engineering techniques over the last few years, many novel chip-integrated LiNbO3-based devices and applications with reduced cost, complexity, power, and size, are demonstrated, boosting the resurgence of integrated photonics based on this material. The remarkable achievements are largely facilitated by the most recent technological progress in photonic integration and performance optimization of LNOI on-chip devices, such as high-quality surface domain engineering, advanced heterogeneous integration technology, powerful dispersion engineering, fine polishing lithography, and wafer-scale fabrication. Accordingly, batch-compatible chip-integrated platforms for more complex photonic integrated circuits, such as quantum optical circuits, are within reach. This article provides a timely review of the key advances in LNOI technology and a reasonable perspective on the near-future directions for both integrated photonics and applied physics communities.
引用
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页数:28
相关论文
共 246 条
[1]   Linear isolators using wavelength conversion [J].
Abdelsalam, Kamal ;
Li, Tengfei ;
Khurgin, Jacob B. ;
Fathpour, Sasan .
OPTICA, 2020, 7 (03) :209-213
[2]   Integration of quantum dots with lithium niobate photonics [J].
Aghaeimeibodi, Shahriar ;
Desiatov, Boris ;
Kim, Je-Hyung ;
Lee, Chang-Min ;
Buyukkaya, Mustafa Atabey ;
Karasahin, Aziz ;
Richardson, Christopher J. K. ;
Leavitt, Richard P. ;
Loncar, Marko ;
Waks, Edo .
APPLIED PHYSICS LETTERS, 2018, 113 (22)
[3]   QUANTUM MATERIALS Quantum emitters in two dimensions [J].
Aharonovich, Igor ;
Toth, Milos .
SCIENCE, 2017, 358 (6360) :170-171
[4]  
Aharonovich I, 2016, NAT PHOTONICS, V10, P631, DOI [10.1038/NPHOTON.2016.186, 10.1038/nphoton.2016.186]
[5]   Subvolt electro-optical modulator on thin -film lithium niobate and silicon nitride hybrid platform [J].
Ahmed, Abu Naim R. ;
Nelan, Sean ;
Shi, Shouyuan ;
Yao, Peng ;
Mercante, Andrew ;
Prather, Dennis W. .
OPTICS LETTERS, 2020, 45 (05) :1112-1115
[6]   Tunable hybrid silicon nitride and thin-film lithium niobate electro-optic microresonator [J].
Ahmed, Abu Naim R. ;
Shi, Shouyuan ;
Zablocki, Mathew ;
Yao, Peng ;
Prather, Dennis W. .
OPTICS LETTERS, 2019, 44 (03) :618-621
[7]   Vertical mode transition in hybrid lithium niobate and silicon nitride-based photonic integrated circuit structures [J].
Ahmed, Abu Naim R. ;
Mercante, Andrew ;
Shi, Shouyuan ;
Yao, Peng ;
Prather, Dennis W. .
OPTICS LETTERS, 2018, 43 (17) :4140-4143
[8]   Germanium-on-insulator (GeOI) substrates - A novel engineered substrate for future high performance devices [J].
Akatsu, Takeshi ;
Deguet, Chrystel ;
Snachez, Loic ;
Allibert, Frederic ;
Rouchon, Denis ;
Signamarcheix, Thomas ;
Richtarch, Claire ;
Boussagol, Alice ;
Loup, Virginie ;
Mazen, Frederic ;
Hartmann, Jean-Michel ;
Campidelli, Yves ;
Clavelier, Laurent ;
Letertre, Fabrice ;
Kernevez, Nelly ;
Mazure, Carlos .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2006, 9 (4-5) :444-448
[9]   Quantum photonics at telecom wavelengths based on lithium niobate waveguides [J].
Alibart, Olivier ;
D'Auria, Virginia ;
De Micheli, Marc ;
Doutre, Florent ;
Kaiser, Florian ;
Labonte, Laurent ;
Lunghi, Tommaso ;
Picholle, Eric ;
Tanzilli, Sebastien .
JOURNAL OF OPTICS, 2016, 18 (10)
[10]  
[Anonymous], 2004, OPTICAL PROPERTIES P