Efficient catalytic combustion in integrated micropellistors

被引：20

作者：

Barsony, I. ^{[1
]}

Adam, M. ^{[1
]}

Fuerjes, P. ^{[1
]}

Lucklum, R. ^{[2
]}

Hirschfelder, M. ^{[3
]}

Kulinyi, S. ^{[4
]}

Duecso, Cs ^{[1
]}

机构：

[1] Res Inst Tech Phys & Mat Sci MFA, H-1525 Budapest, Hungary

[2] Univ Magdeburg, IMOS, D-39106 Magdeburg, Germany

[3] EKF Diagnost Sales GmbH, Barleben, Germany

[4] WESZTA T Ltd, H-2011 Budakalasz, Hungary

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2009年 / 20卷 / 12期

关键词：

explosive gases; catalytic combustion; integrated pellistors; bulk micromachining; electronic nose; METHANE; BUTANE;

D O I：

10.1088/0957-0233/20/12/124009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.

引用

页数：9

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