共 50 条
- [21] STUDIES OF THIN-FILM GROWTH, ADSORPTION, AND OXIDATION BY IN-SITU, REAL-TIME, AND EX-SITU ION-BEAM ANALYSIS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04): : 1557 - 1564
- [22] Real time ellipsometric study of boron nitride thin film growth COVALENT CERAMICS III - SCIENCE AND TECHNOLOGY OF NON-OXIDES, 1996, 410 : 307 - 312
- [24] Numerical ellipsometry: Applications of a new algorithm for real-time, in situ film growth monitoring JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (04): : 2331 - 2336
- [26] REAL-TIME MONITORING OF THE DEPOSITION AND GROWTH OF THIN ORGANIC FILMS BY IN-SITU ELLIPSOMETRY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (05): : 2348 - 2354
- [30] Robust real-time thin film thickness estimation 2006 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 2006, : 57 - +