Fast formation of amorphous titanium dioxide thin films using a liquid-assisted plasma-enhanced deposition process in open air

被引：7
作者：
Mauchauffe, Rodolphe [1 ]
Kang, Seongchan [2 ]
Moon, Se Youn [1 ,2 ]
机构：
[1] Chonbuk Natl Univ, Dept Quantum Syst Engn, 567 Baekje Daero, Jeonju 54896, Jeollabuk Do, South Korea
[2] Chonbuk Natl Univ, Dept Appl Plasma Engn, 567 Baekje Daero, Jeonju 54896, Jeollabuk Do, South Korea
来源：
SURFACE & COATINGS TECHNOLOGY | 2019年 / 376卷
基金：
新加坡国家研究基金会;
关键词：
Atmospheric pressure plasma; TiO2; Thin film; Titanium ethoxide;
D O I：
10.1016/j.surfcoat.2018.01.088
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In this work, the deposition of titanium oxide thin films at atmospheric pressure via an open-air liquid-assisted plasma-enhanced method has been studied. Morphology, chemical composition, crystal structure as well as optical properties of the deposited thin films were investigated. The method successfully enabled the formation of compact and transparent amorphous TiO2 layers with a high deposition rate of 1.2 mu m per minute. The atmospheric pressure method reported here appears to be a promising up-scalable method for the high rate and large scale deposition of amorphous titanium dioxide thin films.
引用
收藏
页码：84 / 89
页数：6
相关论文
共 17 条
[1]   Photocatalytic Anatase TiO2 Thin Films on Polymer Optical Fiber Using Atmospheric-Pressure Plasma [J].
Baba, Kamal ;
Bulou, Simon ;
Choquet, Patrick ;
Boscher, Nicolas D. .
ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (15) :13733-13741
[2]   Spray pyrolysis deposition and characterization of titanium oxide thin films [J].
Castañeda, L ;
Alonso, JC ;
Ortiz, A ;
Andrade, E ;
Saniger, JM ;
Bañuelos, JG .
MATERIALS CHEMISTRY AND PHYSICS, 2003, 77 (03) :938-944
[3]   Deposition of photocatalytic anatase titanium dioxide films by atmospheric dielectric barrier discharge [J].
Chen, Qianqian ;
Liu, Qirong ;
Hubert, Julie ;
Huang, Weide ;
Baert, Kitty ;
Wallaert, Gilles ;
Terryn, Herman ;
Delplancke-Ogletree, Marie-Paule ;
Reniers, Francois .
SURFACE & COATINGS TECHNOLOGY, 2017, 310 :173-179
[4]   Photocatalytic TiO2 thin films synthesized by the post-discharge of an RF atmospheric plasma torch [J].
Collette, Stephanie ;
Hubert, Julie ;
Batan, Abdelkrim ;
Baert, Kitty ;
Raes, Marc ;
Vandendael, Isabelle ;
Daniel, Alain ;
Archambeau, Catherine ;
Terryn, Herman ;
Reniers, Francois .
SURFACE & COATINGS TECHNOLOGY, 2016, 289 :172-178
[5]   Highly efficient photocatalytic TiO2 coatings deposited by open air atmospheric pressure plasma jet with aerosolized TTIP precursor [J].
Fakhouri, H. ;
Ben Salem, D. ;
Carton, O. ;
Pulpytel, J. ;
Arefi-Khonsari, F. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (26)
[6]   C1s Peak of Adventitious Carbon Aligns to the Vacuum Level: Dire Consequences for Material's Bonding Assignment by Photoelectron Spectroscopy [J].
Greczynski, Grzegorz ;
Hultman, Lars .
CHEMPHYSCHEM, 2017, 18 (12) :1507-1512
[7]   TiO2 thin films using organic liquid materials prepared by Hot-Wire CVD method [J].
Iida, Tamio ;
Takamido, Yasuhiko ;
Kunii, Takao ;
Ogawa, Shunsuke ;
Mizuno, Kouichi ;
Narita, Tornoki ;
Yoshida, Norimitsu ;
Itoh, Takashi ;
Nonomura, Shuichi .
THIN SOLID FILMS, 2008, 516 (05) :807-809
[8]   Interface-Engineered Amorphous TiO2-Based Resistive Memory Devices [J].
Jeong, Hu Young ;
Lee, Jeong Yong ;
Choi, Sung-Yool .
ADVANCED FUNCTIONAL MATERIALS, 2010, 20 (22) :3912-3917
[9]   Foldable and Cytocompatible Sol-gel TiO2 Photonics [J].
Li, Lan ;
Zhang, Ping ;
Wang, Wei-Ming ;
Lin, Hongtao ;
Zerdoum, Aidan B. ;
Geiger, Sarah J. ;
Liu, Yangchen ;
Xiao, Nicholas ;
Zou, Yi ;
Ogbuu, Okechukwu ;
Du, Qingyang ;
Jia, Xinqiao ;
Li, Jingjing ;
Hu, Juejun .
SCIENTIFIC REPORTS, 2015, 5
[10]   Liquid-Assisted Plasma-Enhanced Chemical Vapor Deposition of Catechol and Quinone-Functionalized Coatings: Insights into the Surface Chemistry and Morphology [J].
Mauchauffe, Rodolphe ;
Moreno-Couranjou, Maryline ;
Boscher, Nicolas D. ;
Duwez, Anne-Sophie ;
Choquet, Patrick .
PLASMA PROCESSES AND POLYMERS, 2016, 13 (08) :843-856
12