Properties of ruthenia-based resistors embedded in low-temperature Co-firable ceramic substrates

被引：6

作者：

Hsi, CS ^{[1
]}

Lee, MW ^{[1
]}

机构：

[1] I Shou Univ, Dept Mat Sci & Engn, Ta Hsu 84008, Kao Hsiung, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 08期

关键词：

LTCC; resistor; embedded; co-firing; ruthenium oxide;

D O I：

10.1143/JJAP.41.5323

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Commercial thick-film resistor pastes were printed on and embedded in cordierite + borosilicate glass low-temperature cofirable ceramic (LTCC) substrates. The electrical properties of the resistors were found to depend on the final microstructure. Anorthite crystals were produced by the interaction between the substrates and glass composition of the resistor films at boundaries. The anorthite crystals grown into the substrate and the resistor layer increased the overall resistance. Sedimentation of the conductive particles and glass migrating to the substrates decreased the resistor thickness during sintering. Conductive particles in the resistor films flocculated after firing at 850degrees and 900degreesC. Formation of anorthite crystals, conductive particle sedimentation, glass migration, and inter-diffusion were determined to be three major factors determining film resistivity.

引用

页码：5323 / 5328

页数：6

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