Valence state map of iron oxide thin film obtained from electron spectroscopy imaging series

被引:15
作者
Chen, Ko-Feng
Lo, Shen-Chuan
Chang, Li
Egerton, Ray
Kai, Ji-Jung
Lin, Juhn-Jong
Chen, Fu-Rong [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu 30013, Taiwan
[2] Ind Technol Res Inst, Mat Res Labs, Microstruct & Characterizat Lab, Hsinchu 31040, Taiwan
[3] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
[4] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada
[5] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 30010, Taiwan
[6] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan
关键词
valence state map; electron spectroscopic imaging(ESI); iron oxide system; electron energy-loss spectroscopy(EELS);
D O I
10.1016/j.micron.2006.06.004
中图分类号
TH742 [显微镜];
学科分类号
摘要
This paper demonstrates the applicability of electron-spectroscopic imaging (ESI) for valence-state mapping of the iron oxide system. We have previously developed a set of signal-processing methods for an EST series, to allow mapping Of sp(2)/sp(3) ratio, dielectric function and energy bandgap. In this study, these methods are applied to generate a valence-state map of an iron oxide thin film (Fe/alpha-Fe2O3). Two problems, data undersampling and a convolution effect associated with extraction of the image-spectrum from the core loss image series, were overcome by using cubic-polynomial interpolation and maximum-entropy deconvolution. As a result, the reconstructed image-spectrum obtained from the EST series images has a quality as good as that of conventional electron energy-loss spectra. The L-3/L-2 ratio of the reconstructed EST spectrum is determined to be 3.30 +/- 0.30 and 5.0 +/- 0.30 for Fe and alpha-Fe2O3, respectively. Our L-3/L-2, ratio mapping shows an accurate correspondence across the Cu/Fe/alpha-Fe2O3 region. The effect of delocalization and chromatic aberration on the EST resolution is discussed and estimated to be about 2 nm for the case of L-3/L-2, ratio mapping. (c) 2006 Published by Elsevier Ltd.
引用
收藏
页码:354 / 361
页数:8
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