Fabrication of polymer SAW sensor array to classify chemical warfare agents

被引:88
作者
Joo, Byung-Su
Huh, Jeung-Soo
Lee, Duk-Dong
机构
[1] Kyungpook Natl Univ, Sch Elect Engn & Comp Sci, Taegu, South Korea
[2] Kyungpook Natl Univ, Dept Mat Sci & Met, Taegu, South Korea
关键词
SAW sensor array; chemical warfare agent; PEB; PECH; PDMS; PBD; PIP;
D O I
10.1016/j.snb.2006.09.013
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
An array with five SAW sensors using different kinds of polymers was fabricated to detect chemical agents and their gas response characteristics were extensively investigated. The SAW devices with different interdigital transducer (IDT) electrode line widths of 3, 4, 6, 8 and 20 mu m, which corresponded to the central frequencies of 264, 198, 132, 99 and 39.6 MHz, respectively, were designed. The IDT electrodes consisted of 100 finger pairs of 200nm thick aluminum films. The polymers used as the sensing materials were polyisobutylene (PIB), polyepichlorohydrin (PECH), polydimethylsiloxane (PDMS), polybutadiene (PBD) and polyisoprene (PIP). The thin films were coated on a quartz substrate by spin coating technique. Four simulant gases of chemical warfare agents of dimethylmethylphosphonate (DMMP), acetonitrile (CH3CN), dichloromethane (CH2Cl2) and dichloropentane (DCP) were used as target gases, instead of the real nerve, blood, choking and vesicant agents. After spin coating of PIB and PECH, the substrate was heated at 65 degrees C in N-2 ambient for 1 h to remove the cyclohexane and ethylacetate, which were used as solvents. PDMS films were heated at 75 degrees C in a N-2 flow for 2 h to remove the ethylacetate used as a solvent. And PBD and PIP were heated at 60 degrees C in a N-2 flow for 1 h to remove the benzene used as a solvent. The sensing characteristics of the SAW sensors were measured by using E-5061 A network analyzer. The polymer SAW sensor array showed good selectivity to simulant gases. Principal component analysis (PCA) was adapted to classify the chemical warfare agents. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:47 / 53
页数:7
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