A 2D Wind Sensor Using the ΔP Thermal Feedback Control

被引：19

作者：

Wang, Shang ^{[1
]}

Yi, Zhenxiang ^{[1
]}

Qin, Ming ^{[1
]}

Huang, Qing-An ^{[1
]}

机构：

[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Jiangsu, Peoples R China

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2018年 / 27卷 / 03期

基金：

中国国家自然科学基金;

关键词：

Wind sensors; ceramic substrate; temperature-balanced mode; feedback control;

D O I：

10.1109/JMEMS.2018.2812805

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A 2-D MEMS wind sensor based on Delta P (power difference) thermal feedback control is presented. The sensor consists of four outlying heaters and four inlying thermistors in two orthogonal directions on ceramic substrate. A Delta P thermal feedback control system is applied to eliminate the flow-induced temperature difference between upstream and downstream so as to achieve a temperature-balanced mode. This applied power difference among the four heaters is a measure for the wind speed and direction. Experimental results demonstrate that the measured speed varies from 0 to 40 m/s with an error less than +/- 0.5 m/s while the measured direction spans from 0 degrees to 360 degrees with an error less than +/- 2 degrees.

引用

页码：377 / 379

页数：3

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