Integrated sensor systems for advanced machines

Although much effort has been spent on generating vision-based sensors and haptic systems capable of working together for high level control approaches, the development of practical sensor networks, tailored to monitor the internal state of high performance machines, has received less attention. The MEMS-based, electrostatic-microarray approach described in this paper has been used to design and manufacture a variety of silicon-based sensors and networks for the measurement of key machine parameters. This paper focuses on four example systems which are currently being developed to monitor strain, multi-axis strain and rotation in robots, aircraft, submarines, and railroad assets.