Flexible metal-insulator-metal (MIM) devices for plastic film AM-LCD

被引：9

作者：

Hong, SJ ^{[1
]}

Lee, CJ ^{[1
]}

Han, JI ^{[1
]}

Kim, WK ^{[1
]}

Moon, DG ^{[1
]}

Kwak, MG ^{[1
]}

Park, SK ^{[1
]}

Kim, YH ^{[1
]}

机构：

[1] Korea Elect Technol Inst, Informat Display Res Ctr, PyungTaek 451860, KyungGi, South Korea

来源：

CURRENT APPLIED PHYSICS | 2002年 / 2卷 / 03期

关键词：

MIM; flexible electrode; symmetry; I-V characteristics; etch-free process;

D O I：

10.1016/S1567-1739(02)00099-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We developed new flexible metal-insulator-metal (MIM) devices subject to plastic film substrate. The structure of the MINI device is that a Ta2O5 insulator is covered with two flexible Al electrodes on both sides. The flexible structure of the MIM device was successfully fabricated applying our own etch-free process. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：245 / 248

页数：4