Self-assembly of epitaxial monolayers for vacuum wafer bonding

被引：10
作者：
Altfeder, Igor [1 ]
Huang, Biqin
Appelbaum, Ian
Walker, B. C.
机构：
[1] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA
[2] Univ Delaware, Dept Phys, Newark, DE 19716 USA
来源：
APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 22期
关键词：
D O I：
10.1063/1.2399358
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Self-assembled epitaxial metal monolayers can be used for heterointegration of mismatched semiconductors, leading to simultaneously low interfacial resistance and high optical transparency. Lattice-mismatched wafers of Si(100) and Si(111) were bonded at room temperature in situ after vacuum deposition of a single atomic layer of Ag. The interfacial resistance was measured to be 3.9x10(-4) Omega cm(2) and the optical transmission of the interface at 2500 nm is approximately 98%. Electron confinement in ultrathin Ag layers as a possible contributor to the bonding energy. (c) 2006 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 50 条
  • [31] Self-Assembly of Organic Monolayers below the Freezing Threshold
    Wiegart, Lutz
    O'Flaherty, Sean M.
    Schmacke, Saskia
    Gleyzolle, Henri
    Struth, Bernd
    LANGMUIR, 2009, 25 (10) : 5614 - 5618
  • [32] SELF-ASSEMBLY FORMED OXIME MONOLAYERS ON A COPPER SURFACE
    DIEM, T
    FABIANOWSKI, W
    JACCODINE, R
    RODOWSKI, R
    THIN SOLID FILMS, 1995, 265 (1-2) : 71 - 73
  • [33] Self-assembly of monolayers on graphene with pyrene and cyclodextrin derivatives
    Swanson, Emily
    Zhen, Xue
    Buhlmann, Philippe
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
  • [34] Optimal control of electrostatic self-assembly of binary monolayers
    Shestopalov, N. V.
    Henkelman, G.
    Powell, C. T.
    Rodin, G. J.
    NEW JOURNAL OF PHYSICS, 2009, 11
  • [35] Epoxidation of the surface of polydicyclopentadiene for the self-assembly of organic monolayers
    Perring, Mathew
    Long, Tyler R.
    Bowden, Ned B.
    JOURNAL OF MATERIALS CHEMISTRY, 2010, 20 (39) : 8679 - 8685
  • [36] Electrochemical self-assembly of monolayers from alkylthiosulfates on gold
    Lee, MT
    Hsueh, CC
    Freund, MS
    Ferguson, GS
    LANGMUIR, 2003, 19 (13) : 5246 - 5253
  • [37] A new activation method for electroless metal plating: Palladium laden via bonding with self-assembly monolayers
    Xu, LN
    Liao, JH
    Huang, L
    Ou, DL
    Zhou, KC
    Zhang, HQ
    Gu, N
    Liu, JZ
    CHINESE CHEMICAL LETTERS, 2002, 13 (07) : 687 - 688
  • [38] DNA monolayers: Self-assembly and hybridization behavior.
    Gaspar, MFA
    Levicky, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2005, 229 : U673 - U673
  • [39] Self-assembly of organic monolayers on aerosolized silicon nanoparticles
    Liao, Ying-Chih
    Roberts, Jeffrey T.
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2006, 128 (28) : 9061 - 9065
  • [40] Approaches to self-assembly of colloidal monolayers: A guide for nanotechnologists
    Lotito, Valeria
    Zambelli, Tomaso
    ADVANCES IN COLLOID AND INTERFACE SCIENCE, 2017, 246 : 217 - 274
12345