Recent developments in the measurement of aspheric surfaces by contact stylus instrumentation

被引:7
作者
Scott, PJ [1 ]
机构
[1] Taylor Hobson Ltd, Leicester LE4 9JQ, Leics, England
来源
OPTICAL DESIGN AND TESTING | 2002年 / 4927卷
关键词
contact stylus instrument; aspheric measurement; algorithms; areal measurement;
D O I
10.1117/12.464331
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Contact stylus instruments with sufficient range to resolution that could measure and analyze aspheric surfaces first appeared in the 1980s. These where limited to the measurement of a single profile over a rotationally symmetric aspheric surface. Although limited in use they proved to be very useful for the characterization of both optical and non-optical aspheric surfaces, correction of tool paths for aspheric generators etc. The work described here reviews recent developments in the measurement and characterization of aspheric surfaces by contact stylus instrumentation and includes measurement over an area rather than a single profile and measurement and the characterization of non-rotationally symmetric aspheric surfaces. Some of the challenges involved in the areal measurement of aspheric surfaces by contact stylus instrumentation will be described together with the techniques and considerations used to overcome these challenges. Specifically we will describe the mathematical models used to describe the aspheric surfaces and how these can be used to eliminate measurement set-up errors. How the finite size of the stylus can be corrected using techniques developed for image analysis. The automatic detection and removal of asperities using wavelet technology will be described. Finally the benefits and limitations of data fusion techniques to improve the range of the instrument will be reviewed.
引用
收藏
页码:199 / 207
页数:9
相关论文
共 13 条
  • [1] *FOC SOFTW INC, 2001, ZEMAX OPT DES PROGR
  • [2] A NEW STYLUS INSTRUMENT WITH A WIDE DYNAMIC-RANGE FOR USE IN SURFACE METROLOGY
    GARRATT, JD
    [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1982, 4 (03): : 145 - 151
  • [3] THE DIGITAL MORPHOLOGICAL SAMPLING THEOREM
    HARALICK, RM
    ZHUANG, XH
    LIN, C
    LEE, JSJ
    [J]. IEEE TRANSACTIONS ON ACOUSTICS SPEECH AND SIGNAL PROCESSING, 1989, 37 (12): : 2067 - 2090
  • [4] *ISO 10110 12, 1997, OPT OPT INSTR PRE 12
  • [5] *ISO 10110 5, 1996, OPT OPT INSTR PREP 5
  • [6] *ISO 10110 8, 1997, OPT OPT INSTR PREP D
  • [7] *ISO 3274, 1996, GPS SURF TEXT PROF M
  • [8] *ISO TS 16610 1, 2002, GPS FILTR 1
  • [9] *ISO TS 16610 40, 2002, GPS FILTR 40
  • [10] *ISO TS 16610 41, 2002, GPS FILTR 41