Energy Scavenging Aspects of Cantilever based MEMS Piezoelectric Pressure Sensor

Pressure sensor is a wide and matured application in the field of sensing and actuation. With respect to its advancements and its application at remote areas improvise the concept of self powered sensors. As supplying power to remote sensor is hectic one and battery replacement is not a convenient solution. To its advancements, without compromising the sensitivity as well as to explore the energy harvesting credibility of the sensor is an inevitable one at the same conditions. Now, piezoelectric materials are used to harvest energy due to its excellent strain-energy relationship. In this paper, two different sensor model with different unimorph cantilever beams has been designed, analyzed and simulated using the finite element software to explore the energy generation capabilities as well as the sensitivity of pressure sensors. It is found that the trapezoidal model is having the lower resonant frequency compared to the regular rectangular model.