Work function of Ni3Si2 on HfSixOy and SiO2 and its implication for Ni fully silicided gate applications

被引：8

作者：

Kittl, J. A. ^{[1
]}

O'Sullivan, B. J. ^{[1
]}

Kaushik, V. S. ^{[1
]}

Lauwers, A. ^{[1
]}

Pawlak, M. A. ^{[1
]}

Hoffmann, T. ^{[1
]}

Demeurisse, C. ^{[1
]}

Vrancken, C. ^{[1
]}

Veloso, A. ^{[1
]}

Absil, P. ^{[1
]}

Biesemans, S. ^{[1
]}

机构：

[1] IMEC, B-3001 Heverlee, Belgium

来源：

APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 03期

关键词：

D O I：

10.1063/1.2430687

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effective work function (WF) of Ni3Si2 was evaluated on HfSixOy and SiO2 dielectrics. Ni3Si2 forms, in thin film Ni-Si diffusion couples with Ni to Si composition ratios between 1 and 2, after formation of a Ni2Si/NiSi stack and by its reaction at moderate thermal budgets (comparable to those used in back end processing of complementary metal-oxide-semiconductor circuits). Ni3Si2 formation limits, on the Ni-rich side, the process window for NiSi fully silicided (FUSI) gates (NiSi at interface with dielectric) to reacted Ni-Si ratios < 1.5. The WF of Ni3Si2 was found to have similar values and behavior to that of NiSi, both on SiO2 (showing similar modulation with dopants) and on HfSixOy, in contrast to Ni-richer silicides such as Ni2Si and Ni31Si12 which do not exhibit significant WF modulation with dopants on SiO2 and have considerably higher WF on HfSixOy. This suggests that the chemistry and structure of the original NiSi/dielectric interface are not modified significantly by the subsequent growth of Ni3Si2 and implies that its formation may be tolerable when targeting NiSi FUSI gates, thereby expanding the process window for this application. (c) 2007 American Institute of Physics.

引用

页数：3

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