Densely packed PIE shaped vertical-cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation

被引：15

作者：

Ju, YG ^{[1
]}

Lofgreen, D ^{[1
]}

Fiore, A ^{[1
]}

Hu, SY ^{[1
]}

Hegblom, E ^{[1
]}

Louderback, D ^{[1
]}

Sjolund, O ^{[1
]}

Huntington, A ^{[1
]}

Coldren, LA ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, ECE Dept, Santa Barbara, CA 93106 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2000年 / 12卷 / 05期

关键词：

laser arrays; optical fiber communication; optical fiber LAN; optical transmitters; oxidation; semiconductor lasers; surface-emitting lasers; wavelength-division multiplex;

D O I：

10.1109/68.841253

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Wavelength-division-multiplexing (WDM) photonic integrated emitter (PIE) vertical-cavity surface-emitting laser (VCSEL) arrays are fabricated using a post growth wet oxidation technique. High-density integration of WDM VCSEL arrays is possible by combining the technique of one-dimensional oxidation and large-scale tapered oxidation, Eight channels are integrated into a circle of 60 mu m in diameter. Seven channels are found to operate as lasers, The lasing wavelengths range from 823 to 836 nm corresponding with the distance between the VCSEL mesa and the tuning trench. The successful demonstration of incorporating wet oxidation into the wavelength control of the PIE VCSEL array opens a new way of fabricating mask-defined densely packed WDM VCSEL arrays.

引用

页码：462 / 464

页数：3

共 6 条

[1] Postgrowth tuning of semiconductor vertical cavities for multiple-wavelength laser arrays [J].

Fiore, A ;

Akulova, YA ;

Ko, J ;

Hegblom, ER ;

Coldren, LA .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1999, 35 (04) :616-623

[2] Multimode WDM optical data links with monolithically integrated multiple-channel VCSEL and photodetector arrays [J].

Hu, SY ;

Ko, J ;

Hegblom, ER ;

Coldren, LA .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1998, 34 (08) :1403-1414

[3] Multiwavelength, densely-packed 2x2 vertical-cavity surface-emitting laser array fabricated using selective oxidation [J].

Huffaker, DL ;

Deppe, DG .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (07) :858-860

[4] Uniform CW operation of multiple-wavelength vertical-cavity surface-emitting lasers fabricated by mask molecular beam epitaxy [J].

Saito, H ;

Ogura, I ;

Sugimoto, Y .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (09) :1118-1120

[5] Fabrication method for multiple wavelength vertical-cavity emitter arrays by SiNx layer thickness control [J].

Shin, JH ;

Yoo, BS .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1999, 11 (05) :509-511

[6]

SUGIMOTO Y, 1997, P IEEE LEOS SUMM TOP, P7

← 1 →