Raman spectra of DLC films prepared by bipolar-type plasma based ion implantation

被引：0

作者：

Nakao, Setsuo ^{[1
]}

Kim, Jongduk ^{[1
]}

Choi, Junho ^{[1
]}

Miyagawa, Soji ^{[1
]}

Miyagawa, Yoshiko ^{[1
]}

Ikeyama, Masami ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan

来源：

Transactions of the Materials Research Society of Japan, Vol 31, No 3 | 2006年 / 31卷 / 03期

关键词：

Raman spectra; bipolar plasma; PBII; DLC; turbostratic form;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Examination of Raman spectroscopy on the microstructure of diamond like carbon (DLC) films prepared by the bipolar-type plasma based ion implantation as a function of positively and negatively pulsed voltages (V-p and V-n) were carried out. Raman spectra were fitted by 4 peaks (D1: 1190 cm(-1), D2: 1380 cm(-1), G1: around 1530 - 1555 cm(-1) and G2: 1590 cm(-1)). The G1 peak shifted to higher wavenumbers and the intensity of G2 peak was increased with increasing V-p. In addition, the intensity ratio of D (D1 + D2) to G (G1 + G2) peaks was also increased. These results suggested that graphite structure was formed as V-p increased. With increasing V-n, on the other hand, the G1 peak did not shift so much and the intensity of G2 peak was decreased. This corresponds to the development of the turbostratic form (t-DLC).

引用

页码：685 / 688

页数：4

共 50 条

[31] Long-term thermal stability of Si-containing diamond-like carbon films prepared by plasma source ion implantation
Hatada, R.
Baba, K.
Flege, S.
Ensinger, W.
SURFACE & COATINGS TECHNOLOGY, 2016, 305 : 93 - 98
[32] Ion current on the inner surface of a pipe by plasma-based ion implantation and deposition
Ma, XX
Yukimura, K
Ikehata, T
Miyagawa, Y
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 813 - 816
[33] Deposition of diamond-like carbon films on polymers by plasma source ion implantation
Baba, K
Hatada, R
THIN SOLID FILMS, 2006, 506 : 55 - 58
[34] Preparation and antibacterial properties of Ag-containing diamond-like carbon films prepared by a combination of magnetron sputtering and plasma source ion implantation
Baba, K.
Hatada, R.
Flege, S.
Ensinger, W.
Shibata, Y.
Nakashima, J.
Sawase, T.
Morimura, T.
VACUUM, 2013, 89 : 179 - 184
[35] Surface modification of PET film by plasma-based ion implantation
Sakudo, N
Mizutani, D
Ohmura, Y
Endo, H
Yoneda, R
Ikenaga, N
Takikawa, H
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 687 - 690
[36] Raman spectroscopy of few-layer graphene prepared by C2-C6 cluster ion implantation
Wang, Z. S.
Zhang, R.
Zhang, Z. D.
Huang, Z. H.
Liu, C. S.
Fu, D. J.
Liu, J. R.
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 307 : 40 - 42
[37] Deposition of diamond-like carbon films on insulating substrates by plasma source ion implantation
Hatada, R.
Flege, S.
Ensinger, W.
Baba, K.
SURFACE & COATINGS TECHNOLOGY, 2020, 385
[38] Deposition of diamond-like carbon films by plasma source ion implantation with superposed pulse
Baba, K
Hatada, R
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2003, 206 : 708 - 711
[39] Modifying inner surface of a PET bottle by plasma-based ion implantation
Sakudo, N
Endo, H
Yoneda, R
Ohmura, Y
Ikenaga, N
JOURNAL OF ADVANCED OXIDATION TECHNOLOGIES, 2005, 8 (01) : 65 - 70
[40] Two switch high voltage modulator for plasma-based ion implantation
Yukimura, K
Kuze, E
Matsunaga, K
SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 66 - 70

← 1 2 3 4 5 →