Raman spectra of DLC films prepared by bipolar-type plasma based ion implantation

被引：0
|
作者：
Nakao, Setsuo [1 ]
Kim, Jongduk [1 ]
Choi, Junho [1 ]
Miyagawa, Soji [1 ]
Miyagawa, Yoshiko [1 ]
Ikeyama, Masami [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan
来源：
Transactions of the Materials Research Society of Japan, Vol 31, No 3 | 2006年 / 31卷 / 03期
关键词：
Raman spectra; bipolar plasma; PBII; DLC; turbostratic form;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Examination of Raman spectroscopy on the microstructure of diamond like carbon (DLC) films prepared by the bipolar-type plasma based ion implantation as a function of positively and negatively pulsed voltages (V-p and V-n) were carried out. Raman spectra were fitted by 4 peaks (D1: 1190 cm(-1), D2: 1380 cm(-1), G1: around 1530 - 1555 cm(-1) and G2: 1590 cm(-1)). The G1 peak shifted to higher wavenumbers and the intensity of G2 peak was increased with increasing V-p. In addition, the intensity ratio of D (D1 + D2) to G (G1 + G2) peaks was also increased. These results suggested that graphite structure was formed as V-p increased. With increasing V-n, on the other hand, the G1 peak did not shift so much and the intensity of G2 peak was decreased. This corresponds to the development of the turbostratic form (t-DLC).
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页码：685 / 688
页数：4
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