Relationship between structure, surface topography and tribo-mechanical behavior of Ti-N thin films elaborated at different N2 flow rates

被引:34
作者
Aissani, Linda [1 ,2 ]
Alhussein, Akram [3 ]
Ayad, Abdelhak [4 ]
Nouveau, Corinne [5 ]
Zgheib, Elia [3 ]
Belgroune, Ahlam [1 ,3 ]
Zaabat, Mourad [1 ]
Barille, Regis [6 ]
机构
[1] Larbi Ben MHidi Univ, Lab Act Components & Mat, Oum El Bouaghi 04000, Algeria
[2] Abbes Laghrour Khenchela Univ, Phys Dept, PO 1252, El Hamma 40004, Khenchela, Algeria
[3] Univ Technol Troyes, Pole Technol Sud Champagne, LASMIS, 26 Rue Lavoisier, F-52800 Nogent, France
[4] Univ Salah Boubnider Constantine 3 Nouvelle Ville, Fac Med, Dept Pharm, Constantine, Algeria
[5] HESAM Univ, Arts & Metiers Inst Technol, LABOMAP, F-71250 Cluny, France
[6] Univ Angers, Moltech Anjou, CNRS UMR 62002, Bd Lavoisier, F-49045 Angers, France
关键词
Titanium nitride; Magnetron sputtering; Microstructure; Hydrophobicity; Hardness; Adhesion; TRIBOLOGICAL PROPERTIES; RESIDUAL-STRESS; VAPOR-DEPOSITION; CRN COATINGS; MICROSTRUCTURE; TITANIUM; TIALN; FRICTION;
D O I
10.1016/j.tsf.2021.138598
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Titanium nitride films were deposited by reactive magnetron sputtering on Si (100) wafers, glass and Ti6Al4V substrates. The film deposition was carried out in a gas mixture of Ar and N2. The nitrogen content was varied between 0 and 30 % of the total gas mixture. This variation led to the formation of different films with different microstructures. The microstructure of the Ti-N coatings presented nanocomposites with a low tendency to surface oxidation. From a pure Ti to tetragonal Ti2N and cubic Ti-N microstructures, the films showed a (111) TiN plane growth that led to an increase in the lattice strain and a decrease in the grain size when increasing the nitrogen flow rate. The water-film contact angle measurements showed that the surface hydrophobicity increased with the increase of nitrogen content in the film. Mechanical properties were measured and a strong dependence between microstructure and hardness was found. The Ti-N deposited under 20 % of N2 exhibited the highest hardness, the best adhesion and wear resistance, and the lowest friction coefficient with the presence of (111) fiber texture.
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页数:9
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