Fluorinated amorphous carbon as a low-dielectric constant interlayer dielectric

被引：57

作者：

Endo, K

机构：

来源：

MRS BULLETIN | 1997年 / 22卷 / 10期

关键词：

D O I：

10.1557/S0883769400034217

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：55 / 58

页数：4

共 20 条

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