A micro-wind sensor based on mechanical drag and thermal effects

被引:8
作者
Du, Lidong [1 ,2 ]
Zhao, Zhan [1 ]
Fang, Zhen [1 ]
Xu, Jing [1 ,2 ]
Geng, Daoqu [1 ,2 ]
Liu, Yonghong [1 ,2 ]
机构
[1] Chinese Acad Sci, Inst Elect, State Key Lab Transducer Technol, Beijing 100080, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100080, Peoples R China
关键词
Wind sensor; Drag force; Anemometer; Integrated sensor; FLOW; FABRICATION; PRESSURE;
D O I
10.1016/j.sna.2009.07.019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A micro-integrated wind measurement sensor is introduced that is sensitive to both low and high velocity and has both mechanical and thermal parts. The mechanical part, which is based on measuring the drag force, is sensitive and accurate to high velocity. The thermal part, including two hot wires, is sensitive and accurate to low velocity. By removing the thermal effect of the mechanical part and reducing the strain effect of the thermal part, the stability and accuracy of the designed sensor is enhanced. After integration, a wind sensor is obtained that is sensitive and accurate to velocities over a wide range. The direction is measured using two integrated sensors positioned perpendicular to each other. Wind direction is calculated using a specially designed algorithm that takes advantage of the merits of the mechanical and thermal parts. The results indicate that the direction determination precision is improved. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:66 / 72
页数:7
相关论文
共 16 条
[1]   Fabrication and characterization of a wind sensor for integration with a neuron circuit [J].
Argyrakis, Petros ;
Hamilton, Alister ;
Webb, Barbara ;
Zhang, Yaxiong ;
Gonos, Theophile ;
Cheung, Rebecca .
MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1749-1753
[2]   Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors [J].
Bruschi, P. ;
Piotto, M. ;
Barillaro, G. .
SENSORS AND ACTUATORS A-PHYSICAL, 2006, 132 (01) :182-187
[3]   AeroMEMS polyimide based wall double hot-wire sensors for flow separation detection [J].
Buder, Ulrich ;
Petz, Ralf ;
Kittel, Moritz ;
Nitsche, Wolfgang ;
Obermeier, Ernst .
SENSORS AND ACTUATORS A-PHYSICAL, 2008, 142 (01) :130-137
[4]   Drag force micro solid state silicon plate wind velocity sensor [J].
Du, Lidong ;
Zhao, Zhan ;
Pang, Cheng ;
Fang, Zhen .
SENSORS AND ACTUATORS A-PHYSICAL, 2009, 151 (01) :35-41
[5]   Design and fabrication of artificial lateral line flow sensors [J].
Fan, ZF ;
Chen, J ;
Zou, J ;
Bullen, D ;
Liu, C ;
Delcomyn, F .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (05) :655-661
[6]   A capacitive micro gas flow sensor based on slip flow [J].
Jang, JS ;
Wereley, ST .
MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, :540-543
[7]   A miniature silicon hot wire sensor for automatic wind speed measurements [J].
Laghrouche, A ;
Adane, A ;
Boussey, J ;
Ameur, S ;
Meunier, D ;
Tardu, S .
RENEWABLE ENERGY, 2005, 30 (12) :1881-1896
[8]   A novel wind sensor concept based on thermal image measurement using a temperature sensor array [J].
Nguyen, NT .
SENSORS AND ACTUATORS A-PHYSICAL, 2004, 110 (1-3) :323-327
[9]   Asymmetrical locations of heaters and sensors relative to each other using heater arrays: a novel method for designing multi-range electrocaloric mass-flow sensors [J].
Nguyen, NT ;
Dotzel, W .
SENSORS AND ACTUATORS A-PHYSICAL, 1997, 62 (1-3) :506-512
[10]   A novel flow sensor with high time resolution based on differential pressure principle [J].
Richter, M ;
Wackerle, M ;
Woias, P ;
Hillerich, B .
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, :118-123