Reliable quadric relationship of frequency turn-over temperature characteristics vs. electrode film thicknesses for quartz crystal tuning forks

被引:5
作者
Nakazawa, M
Yamamoto, M
Satoh, K
Mori, T
Itoh, H
机构
来源
PROCEEDINGS OF THE 1997 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM | 1997年
关键词
D O I
10.1109/FREQ.1997.638773
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A reliable quadric: formula for frequency turn-over temperature vs. electrode film thickness in the quartz crystal tuning fork is proposed and the coefficients are experimentally determined by the least squares method. Reliable experiments with respect to frequency temperature characteristics for quartz crystal tuning forks are carried out. In particular,a new analysis for the Young's modulus of the electrode film is also described, and it is expected to be valuable to film technology.
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页码:722 / 730
页数:9
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