Maskless fabrication of slanted annular aperture arrays

被引：9

作者：

Lv, Jiangtao ^{[1
]}

Khoo, Eng Huat ^{[2
]}

Leong, Eunice Sok Ping ^{[3
]}

Hu, Litao ^{[4
]}

Jiang, Xiaoxiao ^{[1
]}

Li, Yong ^{[4
]}

Luo, Dan ^{[4
]}

Si, Guangyuan ^{[1
]}

Liu, Yan Jun ^{[4
]}

机构：

[1] Northeastern Univ, Coll Informat Sci & Engn, Shenyang 110004, Peoples R China

[2] ASTAR, Inst High Performance Comp, 1 Fusionopolis Way,Connexis,16-16, Singapore 138632, Singapore

[3] ASTAR, Inst Mat Res & Engn, 2 Fusionopolis Way,Innovis,08-03, Singapore 138634, Singapore

[4] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Peoples R China

来源：

NANOTECHNOLOGY | 2017年 / 28卷 / 22期

基金：

中国国家自然科学基金;

关键词：

annular aperture array; plasmonic resonance; nanofabrication; ENHANCED RAMAN-SCATTERING; OPTICAL-TRANSMISSION; NANOSTRUCTURES; EXCITATION; SURFACES; ADHESION; LIGHT;

D O I：

10.1088/1361-6528/aa6c95

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We report maskless fabrication of high-aspect-ratio slanted annular aperture arrays ( SAAAs) in gold films using focused ion beam lithography. By tilting the substrate, SAAAs with the desired tilting angle can be fabricated. Our experimental results demonstrate accurate control over aperture size, obliqueness, and reproducibility. We also show that the resulted plasmonic resonances of SAAAs can be effectively tuned via obliqueness control. This versatile approach may enable fabrication of more complicated plasmonic nanostructures. The demonstrated gold SAAAs could also find many potential applications in plasmon-assisted sensing and surface enhanced spectroscopy.

引用

页数：7

共 33 条

[1] Adhesion of biologically inspired vertical and angled polymer microfiber arrays [J].

Aksak, Burak ;

Murphy, Michael P. ;

Sitti, Metin .

LANGMUIR, 2007, 23 (06) :3322-3332

[2] Transmission properties of slanted annular aperture arrays. Giant energy deviation over sub-wavelength distance [J].

Alaridhee, T. ;

Ndao, A. ;

Bernal, M. -P. ;

Popov, E. ;

Fehrembach, A. -L. ;

Baida, F. I. .

OPTICS EXPRESS, 2015, 23 (09) :11687-11701

[3] Enhanced transmission through subwavelength metallic coaxial apertures by excitation of the TEM mode [J].

Baida, F. I. .

APPLIED PHYSICS B-LASERS AND OPTICS, 2007, 89 (2-3) :145-149

[4] Enhanced optical transmission by light coaxing: Mechanism of the TEM-mode excitation [J].

Baida, F. I. ;

Belkhir, A. ;

Arar, O. ;

Barakat, E. H. ;

Dandah, J. ;

Chemrouk, C. ;

Van Labeke, D. ;

Diebold, C. ;

Perry, N. ;

Bernal, M. -P. .

MICRON, 2010, 41 (07) :742-745

[5] Gecko-Inspired Surfaces: A Path to Strong and Reversible Dry Adhesives [J].

Boesel, Luciano F. ;

Greiner, Christian ;

Arzt, Eduard ;

del Campo, Aranzazu .

ADVANCED MATERIALS, 2010, 22 (19) :2125-2137

[6] In Situ "Doping" Inverse Silica Opals with Size-Controllable Gold Nanoparticles for Refractive Index Sensing [J].

Cai, Zhongyu ;

Liu, Yan Jun ;

Lu, Xianmao ;

Teng, Jinghua .

JOURNAL OF PHYSICAL CHEMISTRY C, 2013, 117 (18) :9440-9445

[7]

Chu KH, 2010, NAT MATER, V9, P413, DOI [10.1038/NMAT2726, 10.1038/nmat2726]

[8] Double-Resonance Plasmon Substrates for Surface-Enhanced Raman Scattering with Enhancement at Excitation and Stokes Frequencies [J].

Chu, Yizhuo ;

Banaee, Mohamad G. ;

Crozier, Kenneth B. .

ACS NANO, 2010, 4 (05) :2804-2810

[9] Fabrication of metal nanoring array by nanoimprint lithography (NIL) and reactive ion etching [J].

Cui, Bo ;

Veres, Teodor .

MICROELECTRONIC ENGINEERING, 2007, 84 (5-8) :1544-1547

[10] Plasmon Dispersion in Coaxial Waveguides from Single-Cavity Optical Transmission Measurements [J].

de Waele, Rene ;

Burgos, Stanley P. ;

Polman, Albert ;

Atwater, Harry A. .

NANO LETTERS, 2009, 9 (08) :2832-2837

← 1 2 3 4 →