Determination of friction coefficient on ZrN and TiN using lateral force microscopy (LFM)

被引：20

作者：

Arias, Diego F. ^{[1
]}

Marulanda, Diana M. ^{[1
]}

Baena, Alejandra M. ^{[1
]}

Devia, Alfonso ^{[1
]}

机构：

[1] Univ Nacl Colombia, Lab Fis Plasma, Manizales, Colombia

来源：

WEAR | 2006年 / 261卷 / 11-12期

关键词：

titanium nitride; zirconium nitride; friction coefficient; lateral force microscopy;

D O I：

10.1016/j.wear.2006.03.007

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The scanning probe microscopy (SPM) technique has been used in its atomic force microscopy (AFM) and lateral force microscopy (LFM) modes, in order to characterize morphologically and to determine the friction coefficient, respectively, for coatings of TiN and ZrN thin films. The measure on the friction coefficient shows that although these films have similar physical and chemical properties, they present a difference in their friction coefficient, showing that TiN presents a higher friction coefficient than ZrN. Using X-ray diffraction (XRD), the coatings were characterized structurally. Chemical states of the TiN and ZrN films were determined by X-ray photoelectron spectroscopy (XPS). (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：1232 / 1236

页数：5

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