Measurement of hardness of superhard films by microindentation

被引：32

作者：

Musil, J ^{[1
]}

Zeman, H ^{[1
]}

Kunc, F ^{[1
]}

Vlcek, J ^{[1
]}

机构：

[1] Univ W Bohemia, Dept Phys, Plzen 30614, Czech Republic

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 2003年 / 340卷 / 1-2期

关键词：

superhard films; hardness; measurement by microindentation;

D O I：

10.1016/S0921-5093(02)00194-6

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A critical analysis is presented of the measurement by microindentation of the hardness of superhard films with hardness, H, exceeding 50 GPa. This analysis shows that a very high hardness of the Ti-Si-N nanocomposite film reaching a value of 105 GPa, which was recently reported, is hardly a correct value and so till now, very probably, no material harder than diamond has been prepared. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：281 / 285

页数：5

共 9 条

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