Nanoparticle-coated silicon nanowires

被引:12
作者
Hafiz, J. [1 ]
Mukherjee, R. [1 ]
Wang, X. [1 ]
Cullinan, M. [1 ]
Heberlein, J. V. R. [1 ]
McMurry, P. H. [1 ]
Girshick, S. L. [1 ]
机构
[1] Univ Minnesota, Dept Mech Engn, Minneapolis, MN 55455 USA
基金
美国国家科学基金会;
关键词
silicon nanowire; particle impaction; faceted catalyst; thermal plasma; hybrid nanostructure; coating; aerosols;
D O I
10.1007/s11051-006-9111-8
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The synthesis of silicon nanowires that are densely coated with silicon nanoparticles is reported. These structures were produced in a two-step process, using a method known as hypersonic plasma particle deposition. In the first step, a Ti-Si nanoparticle film was deposited. In the second step the Ti-source was switched off, and nanoparticle-coated nanowires grew under the simultaneous action of Si vapor deposition and bombardment by Si nanoparticles. Total process time, including both steps, equaled 5 min, and resulted in formation of a dense network of randomly oriented nanowires covering1.5 cm(2) of substrate area. The nanowires are composed of single-crystal Si. The diameters of the nanowires vary over the range 100-800 nm. Each nanowire has a crystalline TiSi2 catalyst particle, believed to have been solid during nanowire growth, at its tip.
引用
收藏
页码:995 / 1002
页数:8
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