Comparative studies of PST thin films as prepared by sol-gel, LDCVD and sputtering techniques

被引：6

作者：

Huang, Z ^{[1
]}

Donohue, PP ^{[1
]}

Zhang, Q ^{[1
]}

Williams, D ^{[1
]}

Anthony, CJ ^{[1
]}

Todd, MA ^{[1
]}

Whatmore, RW ^{[1
]}

机构：

[1] Cranfield Univ, Sch Ind & Mfg Sci, Dept Adv Mat, Cranfield MK43 0AL, Beds, England

来源：

INTEGRATED FERROELECTRICS | 2002年 / 45卷

关键词：

PST; thin films; sol-gel; sputtering; liquid delivery CVD;

D O I：

10.1080/10584580215349

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lead scandium tantalate (PST) thin films for pyroelectric applications have been deposited by using liquid delivery chemical vaporise deposition (LDCVD), sputtering and sol-gel techniques. These films were annealed by using rapid thermal annealing to improve their electrical properties. Their microstructures and electrical properties such as permittivity epsilon(r) , dielectric loss tandelta, pyroelectric coefficient p, and thermal detection figure of merit F-d were studied. It is suggested to use a combination of methods to depositing films and then use rapid thermal annealing to producing high quality PST thin films.

引用

页码：79 / 87

页数：9