Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching

被引：34

作者：

Romano, L. ^{[1
,2
,3
]}

Kagias, M. ^{[3
,4
,5
]}

Jefimovs, K. ^{[3
,4
,5
]}

Stampanoni, M. ^{[3
,4
,5
]}

机构：

[1] Catania Univ, Dept Phys, 64 Via S Sofia, I-95023 Catania, Italy

[2] Catania Univ, CNR IMM, 64 Via S Sofia, I-95023 Catania, Italy

[3] Paul Scherrer Inst, Swiss Light Source, CH-5232 Villigen, Switzerland

[4] Univ Zurich, Inst Biomed Engn, CH-8092 Zurich, Switzerland

[5] ETH, CH-8092 Zurich, Switzerland

来源：

RSC ADVANCES | 2016年 / 6卷 / 19期

关键词：

CATALYST MOTION;

D O I：

10.1039/c5ra24947c

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Self-assembly gold nanostructured membranes are created to mechanically stabilize the catalyst movement during metal assisted chemical etching. This results in an improved vertical control of the etching profile for high aspect ratio silicon microstructures. The new method is a robust and cheap microfabrication for dense micro-patterns on a large area, such as diffraction gratings for hard X-ray phase contrast imaging and metrology.

引用

页码：16025 / 16029

页数：5

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