Heterodyne polariscope for measuring the principal angle and phase retardation of stressed plastic substrates

被引:7
作者
Lin, S. T. [1 ]
Le, Q. H. [1 ]
Chen, S. H. [2 ]
Chen, C. S. [2 ]
机构
[1] Natl Taipei Univ Technol, Dept Electroopt Engn, 1,Sec 3,Zhongxiao E Rd, Taipei 10608, Taiwan
[2] Natl Taipei Univ Technol, Grad Inst Automat Technol, 1,Sec 3,Zhongxiao E Rd, Taipei 10608, Taiwan
关键词
Heterodyne polariscope; Principal angle; Phase retardation; Plastic substrate;
D O I
10.1016/j.measurement.2021.109096
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A heterodyne polariscope composed of a Zeeman laser, a half-wave plate, two quarter-wave plates, an analyzer, a photo-detector, and an x-y stage is proposed for determining the full-field principal angle and phase retardation of stressed plastic substrates. This paper introduces the configuration, measurement theory, and experimental setup of the polariscope. Additionally, this paper presents experiments as well as the results of these experiments. The experimental results show that the errors of the measured principal angle and phase retardation do not extend beyond 1.07 degrees and 2.86 degrees, respectively, and the results verify the validity and applicability of the proposed polariscope.
引用
收藏
页数:5
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